(383x) Preparation of Porous Carbon Adsorbents Derived from Cpvc and Their Application for Greenhouse Gas Capture

As the semiconductor industry continues to grow steadily, emissions of carbon tetrafluoride (CFâ‚„), one of the specialty gases used in semiconductor production processes, are increasing. CFâ‚„ is a highly stable gas with an atmospheric lifetime of 50,000 years, and it is a potent greenhouse gas that has a global warming potential (GWP) 6,500 times higher than carbon dioxide (COâ‚‚), accelerating global warming. To address environmental issues such as climate change and ecosystem disruption caused by CFâ‚„ emissions, regulations on CFâ‚„ emissions are being strengthened annually. Current methods to reduce atmospheric emissions of CFâ‚„ typically involve high-energy processes, such as thermal of plasma-based decomposition of non-dispersible perfluorocompounds (PFCs), which require high energy consumption and additional post-treatment for decomposition of by-products such as HF, Fâ‚‚, SiFâ‚„, etc. More efficient and effective methods for CFâ‚„ emission reduction and treatment are needed. In this study, a porous carbon adsorbent based on chlorinated polyvinyl chloride (CPVC) was prepared and applied for CFâ‚„ adsorption.