Quantitative HAZOP Modeling and Optimization for Laboratory Operation in the Semiconductor Industry

Unlike the semiconductor manufacturing process with fully automatic equipment, the laboratory operation in the semiconductor industry will still involve multiple types of manual handling for chemical analysis, reliability test, material characterization and failure analysis. The test operators or lab engineers have different levels of exposure to a lot of chemicals and physical hazards in multiple phases. Compared with the traditional qualitative HAZOP analysis, this paper will describe our developed quantitative HAZOP (Hazard and Operability Study) model  to identify the hazards and assess the risks of  laboratory operations. The quantitative description will be deployed in the ways of  manpower, machine, materials, method and environment. The analysis output can be regarded as the aid to optimize safer laboratory design, operator training and real-time fault diagnosis.  This will help to debottleneck and achieve operation safety and occupational health in the semiconductor industry.

Keywords: Quantitative HAZOP Model, Semiconductor Industry, Laboratory Hazards, Operation Debottleneck