The Study of Three-Dimensional Fire Risk Analysis Technique and Its Application on a Semiconductor Cleanroom

The purpose of this research is to establish an integrated method which can assess the risk of fire disaster within a three-dimensional space.  This research employs Fire Dynamics Simulator (FDS) to explore the consequences of personnel injury under fire in a semiconductor cleanroom.  Moreover, the three-dimensional fire risk analysis technique (3D-FRAT) software, programmed in C# language is used to assess the Individual Risk (IR) of the personnel within the cleanroom laboratory.  This study also designs and simulates an isopropanol (IPA) burning event within a chemical station.  Besides assessing the impact of the hazard factors on the equipment and the personnel of a semiconductor cleanroom, the study also calculates the maximum physical effect, the death probability and the individual risk of three types of hazardous factors (thermal radiation of fire, carbon monoxide and smoke).  Additionally, the research outputs the dynamic images, the iso-surface plots, and the transection plots via the graphical software (including SmokeView, FlowVis, and MatFor) to implement the consequences and the risk analysis of the simulation results.  In other words, this paper suggests a new method to calculate the thermal radiation dose of fire and thoroughly analyzes the relation of the unharmed lower limit and the cumulative thermal radiation dose.  After comparing all the results it is worth mentioning that the thermal radiation of the fire individual risk of the cleanroom laboratory is between 2.74×10^-7 (person/year) to 1.68×10^-5 (person/year); the carbon monoxide individual risk of the cleanroom laboratory is between 1.52×10^-23 (person/year) to 3.99×10^-6 (person/year) and the smoke individual risk of the cleanroom laboratory is between 2.74×10^-7 (person/year) to 1.68×10^-5 (person/year), if the laboratory has no protection or all its mitigation measures fail.

Keywords:  Three-Dimensional Fire Risk Analysis Technique, 3D-FRAT), Fire Dynamics Simulator (FDS), thermal radiation, unharmed lower limit, cleanroom, risk assessment.