Reaction Kinetics in Electronic Materials Processing
AIChE Annual Meeting
2005
2005 Annual Meeting
Materials Engineering and Sciences Division
Oral
Cincinnati Convention Center
Friday, November 4, 2005 - 8:00am to 10:30am
Chair(s)
Rogers, B. R., Vanderbilt University
Bulk gas phase and liquid phase reactions, reactions in plasmas, and reactions occurring at gas-solid, solid-liquid and solid-solid interfaces are essential to the fabrication of modern electronic devices. This session is focused on topics related to the evaluation and control of reaction kinetics during the processing of electronic materials, including experimental evaluations and modeling and simulation efforts.
Presentations
Checkout
Paper abstracts are public but to access Extended Abstracts, you must first purchase the conference proceedings.
Do you already own this?
Log In for instructions on accessing this content.
Pricing
Individuals
| AIChE Pro Members | $150.00 |
| AIChE Graduate Student Members | Free |
| AIChE Undergraduate Student Members | Free |
| AIChE Explorer Members | $225.00 |
| Non-Members | $225.00 |