Process Monitoring and Fault Detection I | AIChE

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Process Monitoring and Fault Detection I

Chair(s)

Qin, S. J., The University of Texas at Austin

Developments in process monitoring and fault detection.

Presentations

12:30 PM
(92a) Process Trend Monitoring Based on Key Sensitive Index: Applications Semiconductor Manufacturing
12:50 PM
(92b) Statistical Fault Detection of Batch Processes in Semiconductor Manufacturing
1:10 PM
(92c) Real-Time Thin Film Characterization during Chemical Vapor Deposition Using Moving Horizon Estimation
1:30 PM
(92d) Industrial Implementation of on-Line Multivariate Quality Control (Part II: Long-Term Performance, Model Maintenance, and Model Leveraging)
1:50 PM
(92e) Evolving Models and a Pls Similarity Factor for Monitoring Batch Processes
2:10 PM
(92f) Bio-Reactor Monitoring with Multiway-Pca and Model Based-Pca
2:30 PM
(92g) Variance Component Analysis Based Fault Diagnosis of Multi-Layer Overlay Lithography Processes

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AIChE Pro Members $150.00
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AIChE Explorer Members $225.00
Non-Members $225.00

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