Simulation and Control of Electronic Materials Manufacturing Processes | AIChE

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Simulation and Control of Electronic Materials Manufacturing Processes

Chair(s)

Salinger, A., Sandia National Laboratories

Co-chair(s)

Adomaitis, R., University of Maryland

The session introduces novel simulation and control techniques applied to electronic materials manufacturing processes.

Presentations

3:15 PM
(698a) On State Estimation in the Low-Volume High-MIX Semiconductor Manufacturing Using a Singular Gauss-Markov Model
3:40 PM
(698b) Modeling and Control of the Gradient Freeze Method of Crystal Growth
4:05 PM
(698c) Combining a Legacy Cfd Code with an Evolutionary Algorithm to Perform Optimization Analysis of Chemical Vapor Deposition Systems
4:30 PM
(698d) System Identification and Model Predictive Control of Microstructure during Thin-Film Growth
4:55 PM
(698e) Building Non-Parametric Models for Rsm: a Bayesian Approach and Its Application to Plasma Etching
5:20 PM
(698f) Effects of Temperature and Structural Defects on the Theoretical Strength of

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Individuals

AIChE Pro Members $150.00
AIChE Graduate Student Members Free
AIChE Undergraduate Student Members Free
AIChE Explorer Members $225.00
Non-Members $225.00

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