(446e) In-Situ Characterization of Dynamics of Impurity Absorption and Outgassing in Porous Low-K Dielectric Thin Films
AIChE Annual Meeting
2007
2007 Annual Meeting
Materials Engineering and Sciences Division
Reaction Kinetics In Electronic Materials Processing
Wednesday, November 7, 2007 - 1:50pm to 2:10pm
Checkout
This paper has an Extended Abstract file available; you must purchase the conference proceedings to access it.
Do you already own this?
Log In for instructions on accessing this content.
Pricing
Individuals
| AIChE Pro Members | $150.00 |
| AIChE Graduate Student Members | Free |
| AIChE Undergraduate Student Members | Free |
| AIChE Explorer Members | $225.00 |
| Non-Members | $225.00 |