Micro- and Nanofabricated Sensors

This session will focus on micro and nanosensors, with specific emphasis on the fabrication approaches and unique applications. Silicon-based MEMS fabrication technology and its potential and limitations for microsensor development will be addressed in this session. The incorporation of sensors into sensor arrays or other forms of sensor integration into micro and nanosystems are also of interest. Advances in non-planar, non-silicon based fabrication strategies, including nanotube or nanoelectrode configurations as microsensors or microdetection systems will be a focus.