(56c) Overcoming Patterning Challenges at the 32 Nm Nodes

Conference

AIChE Annual Meeting

Year

2008

Proceeding

2008 Annual Meeting

Group

Materials Engineering and Sciences Division

Session

Topics in Plasma Science and Thin Film Applications I - in Honor of Herbert H. Sawin

Time

Monday, November 17, 2008 - 9:40am to 10:10am

Authors

Mahorowala, A. - Presenter, IBM

Overcoming Patterning Challenges at the 32 nm Nodes