Gas Phase Deposition and Interfacial Phenomena
AIChE Annual Meeting
2012
2012 AIChE Annual Meeting
Materials Engineering and Sciences Division
Oral
Fayette
Westin
Thursday, November 1, 2012 - 3:15pm to 5:45pm
Chair(s)
Gupta, M., University of Southern California
Gas phase deposition includes a wide variety of thin film growth technologies, including physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD), and molecular beam epitaxy (MBE), as well as several other methods included within these broad topics.
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