Gas Phase Deposition and Interfacial Phenomena | AIChE

Gas Phase Deposition and Interfacial Phenomena

Chair(s)

Gupta, M., University of Southern California

Gas phase deposition includes a wide variety of thin film growth technologies, including physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD), and molecular beam epitaxy (MBE), as well as several other methods included within these broad topics.

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