(22c) Removal of AMC By Photocatalytic Degradation

Abstract

    The airborne molecular contaminants (AMC) in information technology (IT) and optoelectronics industries include isopropyl alcohol (IPA), acetone and propylene glycol methyl ether acetate (PGMEA). IPA and acetone take up around 50% to 80% of the total emissions [1].The need of removal of ppb-level AMC in the environments of the IT factory is increasing. Therefore, we apply our photocatalyst, which can be operated at rather low concentrations and with high removal efficiency. The system consists of honeycomb monolith, optical fiber and photo-reactor to increase the removal efficiency of IPA and acetone.

    According to the preliminary test, we are convinced that IPA was degraded into smaller molecules, for example, acetone was found in the exhaust gas without measurable concentration amount after the IPA degradation. Almost all the IPA was oxidized into carbon dioxide and water without forming other AMC. Different kind of loaded metals (e.g., Manganese, Iron, and etc.) will be further investigated to enhance the removal efficiency of the photocatalyst.

 Acknowledgements

     The authors thank the National Science Council of Taiwan and TSMC (Taiwan Semiconductor Manufacturing Company) for supporting this project. (NSC 101-2622-E-002-010-CC2)

 References 

 [1] Ching-shan Hsu, Adsorption/Desorption Studies of Volatile Organic Compounds Generated from the Optoelectronics Industry by Zeolites, 2006.