(289a) Crystalline SrHfO3 Grown Directly on Ge (001) By Atomic Layer Deposition for High-k Gate Oxides in Ge-Based Transistors | AIChE

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(289a) Crystalline SrHfO3 Grown Directly on Ge (001) By Atomic Layer Deposition for High-k Gate Oxides in Ge-Based Transistors

Authors 

Ekerdt, J. G. - Presenter, University of Texas at Austin
McDaniel, M. D., University of Texas at Austin
Ngo, T., University of Texas at Austin
Posadas, A.,
Hu, C.,
Chopra, S.,
Yu, E.,
Demkov, A.,

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