(71b) Precursor Utilization in Atomic Layer Deposition on Nanostructured Materials in Fluidized Bed Reactors | AIChE

(71b) Precursor Utilization in Atomic Layer Deposition on Nanostructured Materials in Fluidized Bed Reactors

Authors 

van Ommen, J. R. - Presenter, Delft University of Technology
Kreutzer, M. T., Delft University of Technology
Grillo, F., ETH Zurich

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