(198l) TiO2 Thin Film Deposition By Electrospray

Electrospray atomization has unique capabilities for deploying colloidal suspensions to create nanoparticle films and coatings using high electric potentials. In this research, electrospray was used to deposit TiO₂ prepared from TiCl₄ via a low-temperature solution process. The thickness of the TiO₂ thin film was modulated by varying the electrospray time. The growth mechanism of the TiO₂ film was investigated using scanning electron microscopy. The crystallinity of the film before and after annealing was measured to study the effect of heat treatment on the deposit structure. To evaluate its function, a TiO₂ film was deposited on to a transparent conductive oxide to investigate its application for dye sensitized solar cells.