(90e) New Materials and Techniques for Producing Robust, High-Fidelity, High-Throughput Microfluidic Droplet Generators
AIChE Spring Meeting and Global Congress on Process Safety
2009
2009 Spring Meeting & 5th Global Congress on Process Safety
Applications of Microreactor Engineering
Microprocessing: Synthesis, Separation, and Simulation
Wednesday, April 29, 2009 - 10:35am to 11:00am
With the goal of enhancing the throughput of microfluidic emulsification of polymerizable liquids, we explore the creation of microfluidic devices in cyclo olefin polymers via hot embossing (HE) by using photoresist-based stamps. Photoresist-based stamps are advantageous because they can be robust enough for repeated use; they are inexpensive and are fast to make; they can support feature sizes down to hundreds of nanometers and are created by photolithography.
This work reviews the process for making SU-8 stamps and characterizes their durability.
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