(66d) Coupled Electrostatic and Pneumatic Microvalves for Portable Chemical Microsystems
AIChE Spring Meeting and Global Congress on Process Safety
2011
2011 Spring Meeting & 7th Global Congress on Process Safety
University Research for Industry
Industry Needs and Goals for University Research
Tuesday, March 15, 2011 - 3:30pm to 4:00pm
We report the design, fabrication, and testing of an electrostatically actuated microvalve made exclusively with soft-lithographic techniques that can be utilized to route pressure to pneumatic actuators on portable chemical microsystems.
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