(82u) Influence of Yttrium Doping Into Hafnium Dioxide on Film Structure and Dielectric Properties

Conference

AIChE Spring Meeting and Global Congress on Process Safety

Year

2011

Proceeding

2011 Spring Meeting & 7th Global Congress on Process Safety

Group

Liaison Functions

Session

Spring Meeting Poster Session and Networking Reception

Time

Tuesday, March 15, 2011 - 5:00pm to 6:30pm

Authors

Tao, Sr., Q. - Presenter, University of Illinois at Chicago

Takoudis, C. - Presenter, University of Illinois at Chicago

Jursich, G. - Presenter, University of Illinois at Chicago

Topics