(43x) HAZOP Analysis and Debottleneck for Laboratory Operation in the Semiconductor Industry

Unlike the semiconductor manufacturing process with fully automatic equipments, the laboratory operation in the semiconductor industry will still involve multiple types of manual handling for chemical analysis, reliability test, material characterization and failure analysis. The test operators or lab engineers have different levels exposure to a lot of chemicals and physical hazards in multiple phases. This paper will describe the straightforward HAZOP process to identify the hazards and assess the risks of  laboratory operations. The analysis will be deployed in the ways of  manpower, machine, materials, method and environment. The analysis output can be regarded as the aid to safer laboratory design, operator training and real-time fault diagnosis.  This will help to debottleneck and achieve operation safety and occupational health in the semiconductor industry.

Keywords: HAZOP Analysis, Semiconductor Industry, Laboratory Hazards, Operation Debottleneck