(44al) Fire Protection and Life Safety Issues in Semiconductor and Related Facilities

Semiconductor and related process facilities contain numerous fire and explosion hazards that impact life safety and operations.  This presentation discusses the major fire protection and life safety design aspects for such facilities, including specific requirements contained in the International Building & Fire Codes, as well as applicable NFPA codes and standards.  Project examples will be used to illustrate how these aspects are addressed in facility and process design.

 The presentation will include the following:

Location and design of Use Group H-5 occupancies – Major IBC Chapter 4, IFC Chapter 18, and NFPA 318 fire protection and life safety requirements, including vertical and horizontal location, occupancy separation, code approach for associated mechanical spaces including interstitial levels, electrical classification, ventilation, fire suppression (overhead and local), fire and gas/vapor detection, and emergency alarms. 

Location and design of Use Group H-2, H-3 and H-4 storage areas – Building and fire code requirements for vertical and horizontal location, occupancy separation, electrical classification, ventilation, fire suppression, fire and gas/vapor detection, and spill control/secondary containment.  Approaches and ideas on the number, location and function of flammable liquid, flammable and pyrophoric gas, and highly toxic gas storage areas, including piping and delivery philosophy. 

Special suppression and detection – Fire protection system approaches for hazards found in a clean room/fab area, eg. wet bench chemistry involving flammable liquids, and processing that uses hydrogen and/or silane mixtures.  Discussion of local suppression options, as well as specialty gas and flame detection.  We will give our thoughts and experiences on how these systems interact with the rest of the building and the responding fire department.

Industrial Issues – Hydrogen detection; combustible dust hazards; NEC Article 500 electrical classification; explosion protection; and several examples from our industrial/chemical project experience

Licensing and permitting – Discussion of issues faced by owners of fab and clean room facilities that store and use hazardous materials, where the hazards are not clearly understood outside of the semi-conductor industry.