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(258b) Prediction Of Feature Profile Evolution In Shallow Trench Isolation Etching Conference AIChE Annual Meeting Year 2007 Proceeding 2007 Annual Meeting Group Materials Engineering and Sciences Division Session Plasma Processing Time Tuesday, November 6, 2007 - 12:50pm to 1:10pm Authors Hoang, J. - Presenter, University of California at Los Angeles
Conference AIChE Annual Meeting Year 2007 Proceeding 2007 Annual Meeting Group Materials Engineering and Sciences Division Session Plasma Processing Time Tuesday, November 6, 2007 - 12:50pm to 1:10pm