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(258d) The Effect Of Polymerizing Chemistry And Ion Flux On Oxide Fencing, Line Edge Roughness, And Micro-Trenching In Nano-Scale Interconnect Structures For 45 Node Reactive Ion Etching Process Conference AIChE Annual Meeting Year 2007 Proceeding 2007 Annual Meeting Group Materials Engineering and Sciences Division Session Plasma Processing Time Tuesday, November 6, 2007 - 1:30pm to 1:50pm Authors Alkhawaldeh, A. - Presenter, Texas Instruments
Conference AIChE Annual Meeting Year 2007 Proceeding 2007 Annual Meeting Group Materials Engineering and Sciences Division Session Plasma Processing Time Tuesday, November 6, 2007 - 1:30pm to 1:50pm