(456c) Material Characteristics And Electrical Properties Of Hafnium Silicate Films Synthesized By Plasma Enhanced Atomic Layer Deposition | AIChE

Other Sites & Tools

Technical Groups

(456c) Material Characteristics And Electrical Properties Of Hafnium Silicate Films Synthesized By Plasma Enhanced Atomic Layer Deposition

Authors 

Liu, J. - Presenter, University of California at Los Angeles
Martin, R. M. - Presenter, University of California
Sawkar, M. - Presenter, University of California

More Conference Links