Atomic Layer Deposition
AIChE Annual Meeting
2007
2007 Annual Meeting
Materials Engineering and Sciences Division
Oral
Room 251 C
Salt Palace Convention Center
Wednesday, November 7, 2007 - 3:30pm to 6:00pm
Chair(s)
Musgrave, C., Stanford University
This session focuses on the deposition of ultrathin films by atomic layer deposition. It focuses on topics ranging from new ALD chemistries and films, process characteristics, chemical mechanisms, surface science, substrate effects, deposition on particles and properties of ALD deposited films.
Presentations
3:55 PM
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Pricing
Individuals
| AIChE Pro Members | $150.00 |
| AIChE Graduate Student Members | Free |
| AIChE Undergraduate Student Members | Free |
| AIChE Explorer Members | $225.00 |
| Non-Members | $225.00 |