Bo Lu

Citation name

Lu, B.

Affiliation

The University of Texas at Austin

State

TX

Country

USA

Authored

(587d) Robust Virtual Metrology of Plasma Etch Tools Using Growing Structure Multiple Models Systems with Dynamic Partial Least Squares Models

Thomas F. Edgar

2014 AIChE Annual Meeting (ISBN: 978-0-8169-1086-1)

(345d) Best Practices on Creating Soft Sensor Models for Batch Processes Utilizing Multi-Way Partial Least Squares (MPLS)

2015 AIChE Annual Meeting Proceedings (ISBN: 978-0-8169-1094-6)

Associated proceedings

2014 AIChE Annual Meeting

2015 AIChE Annual Meeting Proceedings