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L. Chan Citation name Chan, L. Affiliation Chartered Semiconductor Manufacturing Ltd, Singapore Country Singapore Authored(446a) Defect Engineering For Ultrashallow Junctions Using SurfacesCharlotte KwokRamakrishnan VaidyanathanS.H. YeongM. P. SrinivasanB. ColombeauL. Chan2007 Annual Meeting Associated proceedings 2007 Annual Meeting
Citation name Chan, L. Affiliation Chartered Semiconductor Manufacturing Ltd, Singapore Country Singapore