Yu-Chi Liang

Citation name

Liang, Y. C.

Affiliation

University of Houston

State

TX

Country

USA

Authored

(397aj) Development of Self-Aligned Contact Using Negative Tone Lift-Off Process for Electron Beam Lithography On Phost/Pmgi Bilayer Resists

Dmitri Litvinov

2013 AIChE Annual Meeting (ISBN: 978-0-8169-1110-3)

Associated proceedings

2013 AIChE Annual Meeting