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Feiyang Ou Citation name Ou, F. Affiliation University of California, Los Angeles State CA Country USA Authored(623h) Multiscale Computational Fluid Dynamics Modeling of Spatial Atomic Layer Etching for Aluminum Oxide Thin FilmsGerassimos OrkoulasSungil YunPanagiotis ChristofidesMatthew TomFeiyang OuHenrik Wang2022 Annual Meeting (ISBN: 978-0-8169-1118-9)(689e) Multivariable Run-to-Run Control of Thermal Atomic Layer Etching of Aluminum Oxide Thin FilmsSungil YunMatthew TomFeiyang OuGerassimos OrkoulasPanagiotis Christofides2022 Annual Meeting (ISBN: 978-0-8169-1118-9)(484f) Operation and Control of Spatial Atomic Layer Etching ProcessMatthew TomSungil YunFeiyang OuHenrik WangGerassimos OrkoulasPanagiotis Christofides2022 Annual Meeting (ISBN: 978-0-8169-1118-9)(377d) Multiscale CFD Modeling of an Area-Selective Atomic Layer Deposition Process: Application to Discrete Feeding Reactor Configuration DesignMatthew TomPanagiotis ChristofidesHenrik WangFeiyang OuGerassimos Orkoulas2023 AIChE Annual Meeting (ISBN: 978-0-8169-1120-2)(433b) Time-Series Modeling for Run-to-Run Control of an Area-Selective Atomic Layer Deposition ProcessMatthew TomSungil YunHenrik WangFeiyang OuGerassimos OrkoulasPanagiotis Christofides2023 AIChE Annual Meeting (ISBN: 978-0-8169-1120-2)(135a) Real-Time Feedback Control of an Atomic Layer Etching Spatial ReactorFeiyang OuMatthew TomHenrik WangGerassimos OrkoulasPanagiotis Christofides2023 AIChE Annual Meeting (ISBN: 978-0-8169-1120-2)(317c) On-Line Feedback Control of an Area-Selective Atomic Layer Deposition Spatial ReactorMatthew TomHenrik WangFeiyang OuGerassimos OrkoulasPanagiotis Christofides2023 AIChE Annual Meeting (ISBN: 978-0-8169-1120-2) Associated proceedings 2022 Annual Meeting 2023 AIChE Annual Meeting