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Henrik Wang Citation name Wang, H. Affiliation University of California, Los Angeles State CA Country USA Authored(623h) Multiscale Computational Fluid Dynamics Modeling of Spatial Atomic Layer Etching for Aluminum Oxide Thin FilmsGerassimos OrkoulasSungil YunPanagiotis ChristofidesMatthew TomFeiyang OuHenrik Wang2022 Annual Meeting (ISBN: 978-0-8169-1118-9)(484f) Operation and Control of Spatial Atomic Layer Etching ProcessMatthew TomSungil YunFeiyang OuHenrik WangGerassimos OrkoulasPanagiotis Christofides2022 Annual Meeting (ISBN: 978-0-8169-1118-9)(377d) Multiscale CFD Modeling of an Area-Selective Atomic Layer Deposition Process: Application to Discrete Feeding Reactor Configuration DesignMatthew TomPanagiotis ChristofidesHenrik WangFeiyang OuGerassimos Orkoulas2023 AIChE Annual Meeting (ISBN: 978-0-8169-1120-2)(433b) Time-Series Modeling for Run-to-Run Control of an Area-Selective Atomic Layer Deposition ProcessMatthew TomSungil YunHenrik WangFeiyang OuGerassimos OrkoulasPanagiotis Christofides2023 AIChE Annual Meeting (ISBN: 978-0-8169-1120-2)(135a) Real-Time Feedback Control of an Atomic Layer Etching Spatial ReactorFeiyang OuMatthew TomHenrik WangGerassimos OrkoulasPanagiotis Christofides2023 AIChE Annual Meeting (ISBN: 978-0-8169-1120-2)(317c) On-Line Feedback Control of an Area-Selective Atomic Layer Deposition Spatial ReactorMatthew TomHenrik WangFeiyang OuGerassimos OrkoulasPanagiotis Christofides2023 AIChE Annual Meeting (ISBN: 978-0-8169-1120-2)(632d) Multivariable Run-to-Run Control for an Atomic Layer Etching Process Using a Transformer ModelHenrik WangFeiyang OuJulius SuhermanGerassimos OrkoulasPanagiotis Christofides2024 AIChE Annual Meeting (ISBN: 978-0-8169-1122-6)(375u) Time-Series Multiscale Computational Fluid Dynamics Data Modeling with Transformers for Atomic Layer ProcessingHenrik WangFeiyang OuJulius SuhermanMatthew TomGerassimos OrkoulasPanagiotis Christofides2024 AIChE Annual Meeting (ISBN: 978-0-8169-1122-6)(314g) Fault Detection for an Atomic Layer Etching Process Using Machine LearningHenrik WangMatthew TomFeiyang OuGerassimos OrkoulasPanagiotis Christofides2024 AIChE Annual Meeting (ISBN: 978-0-8169-1122-6)(458h) Online Feedback Control of an Atomic Layer Etching Process Using Model Predictive Control Based on a Transformer ModelFeiyang OuHenrik WangJulius SuhermanGerassimos OrkoulasPanagiotis Christofides2024 AIChE Annual Meeting (ISBN: 978-0-8169-1122-6) Associated proceedings 2022 Annual Meeting 2023 AIChE Annual Meeting 2024 AIChE Annual Meeting
